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|
组分名称及浓度范围 |
平衡气 |
|
CO2 5-10% |
N2 |
|
CO2 5ppm O2 10-20% |
N2 |
|
CO 0.3% C2H2 0.3% CH4 0.3% O2 20.9% |
N2 |
|
CO 0.2-0.3% He 10% O2 20% |
N2 |
|
F2 0.1-0.25% Ar 3-5% |
Ne |
|
F2 0.1-0.2% Ar 1-3% He 2-3% |
Ne |
|
F2 0.2-0.3% Ar 3-5% 9-11% He 20-30% |
Ne |
|
Ar 5-8% He 2-4% |
Ne |
